An ultrafast laser micro-nano fabrication center with additive and subtractive materials enables 3D additive processing of photoresists and surface structure treatment, such as selective laser ablation or modification of glass, metal, alloy, etc.
With features of high precision, ultra-high speed, large-area processing, fully automatic control, long-time stability, smart and intuitive workflow software, that make it the optimal tool for rapid prototyping and batch processing in the fields of micro-optics, biomedical engineering, photonics integration, micromechanics and et al..
Dual-Wavelength Femtosecond Laser System
- Compatible with a variety of processing materials, enabling additive and subtractive manufacturing
High-Energy Femtosecond Laser Pulses
- Material surface subtractive processing or internal modification + complex 3D structures
High Precision
- Minimum feature size ≤ 100nm, surface roughness ≤ 10nm
- Nanoscale high-accuracy position recognition and alignment
High Speed
- Maximum scanning speed up to 80,000mm/s
- Parallel processing
High Stability
- Laser energy stabilization system
- High-precision constant temperature control system
- Optical stabilization, automatic leveling of the processing surface, automatic focusing, and automatic tracking of the processing surface
Real-Time High-Definition Microscopic Imaging
3D Large-Area Processing
Focusing Spot Shaping Technology
For equipment parameters,please call0535-2981985、18615037996