PROME-Uni is a high-performance and ultra-high fabrication efficiency nano-scale 3D direct laser writing system based on the principle of multi-photon polymerization. With modular optic-mechanical-electric design and long-time stability, the system offers the high-precision on demand for tailored 3D nano-, micro- and macro structures as well as large print area. It has important applications in photonic wire bonding, microfluidics, refractive &diffractive microoptics, optical sensing, metamaterials, micromechanics, etc.
High Precision
- Minimum feature size ≤70nm, surface roughness ≤10nm
- Nanoscale positioning
- Stitch-free processing
Ultra-fast speed
- Maximum scanning speed up to 80,000mm/s
- Parallel processing
High stability
- Constant temperature and humidity control system
- Automatic optical calibration, automatic leveling of processing surface, and real-time autofocus
High Flexibility
- Multiple processing modes available, quick upgrades and expansions
- Option for professional and intelligent modes in the fully automatic visual process control system
- Graphical and process-editing language for enhanced equipment control flexibility
- High-precision detection and positioning module, ultra-high-speed processing module
3D large printing volume
- Unlimited processing volume
- Sufficient space for improving substrate holder
For equipment parameters,please call0535-2981985、18615037996